Development of Near-Field-Enhanced High-Fill-Factor MEMS Radiator with Shared Spring

[摘要] For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we propose a high-fill factor MEMS radiator enhanced by the near-field effect. We have successfully fabricated a prototype with parylene shared springs and achieved a fill factor of as high as 89%. It is found that at the ON state, the diaphragm temperature is increased from 58.0 °C to 106.4 °C, showing 144% enhancement in the radiation heat flux.

[发布机构] Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan^1

[效力级别] 能源学

[关键词] Fill factor;High fill factors;Near field effect;Near fields;Parylenes;Radiation heat flux;Thermal boundary conditions;Thermal control