Low background, UHV compatible scintillator detector for the CLS cryo scanning soft X-ray microscope

[摘要] A new soft X-ray scanning transmission X-ray microscope (STXM) optimized for cryo spectro-tomography was designed and commissioned at the Canadian Light Source (CLS). The instrument was required to achieve ultra high vacuum and be compatible with in-situ plasma cleaning. It also required a scintillator detector, and the design of this detector had to evolve to meet these environmental requirements. The scintillator deposition technique, and the suppression of background by introduction of an edge filter are also presented.

[发布机构] Canadian Light Source Inc., 44 Innovation Boulevard, Saskatoon; SK; S7N 2V3, Canada^1;Department of Chemistry, University of Saskatchewan, 110 Science Place, Saskatoon; SK; S7N 5C9, Canada^2;Brockhouse Institute for Materials Research, McMaster University, 1280 Main Street West, Hamilton; ON; L8S 4M1, Canada^3

[关键词] Cryo-scanning;Deposition technique;Edge filters;Environmental requirement;Low background;Plasma cleaning;Scintillator detector;Transmission x-rays