Circuit Modeling of a MEMS Varactor Including Dielectric Charging Dynamics

[摘要] Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.

[发布机构] School of Electrical, Electronic and Communications Engineering, University College Dublin, Dublin, Ireland^1;Micro and Nano Technologies Group Electronic Engineering Department, Technical University of Catalonia, Barcelona, Spain^2

[效力级别] 力学 [学科分类] 力学，机械学

[关键词] Capacitance values;Circuit modeling;Commercial circuit simulators;Dielectric charging;Electrical models;Function of time;MEMS varactor;Verilog-a models