Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

[摘要] The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor (Q) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 10-6. This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor.

[发布机构] Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, Hans-Sommer-Straße 66, Braunschweig; D-38106, Germany^1;Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a, Braunschweig; D-38106, Germany^2

[效力级别] 力学 [学科分类] 力学，机械学

[关键词] Airborne nanoparticles;Harmonic oscillators;Phase Locked Loop (PLL);Process development;Resonance frequencies;Resonance frequency analysis;Sensor performance;Wheatstone bridges