Process flow to integrate nanostructures on silicon grass in surface micromachined systems

[摘要] The process flow to integrate metallic nanostructures in surface micromachining processes is presented. The nanostructures are generated by evaporation of microstructured silicon grass with metal. The process flow is based on the lift-off of a thin amorphous silicon layer deposited using a CVD process. All steps feature a low temperature load beneath 120 °C and high compatibility with many materials as only well-established chemicals are used. As a result metallic nanostructures usable for optical applications can be generated as part of multilayered microsystems fabricated in surface micromachining.

[发布机构] Micromechanical Systems Group, IMN MacroNano, Technische Universität Ilmenau, Ilmenau; 98693, Germany^1;Micro-Hybrid Electronic GmbH, Hermsdorf; 07629, Germany^2;Leibniz-Institut für Photonische Technologien E.V., Jena; 07702, Germany^3

[效力级别] 力学 [学科分类] 力学，机械学

[关键词] Amorphous silicon layers;Low temperatures;Metallic nanostructure;Micro-machined;Microstructured silicons;Optical applications;Process flows;Surface micromachining process