Influence of Various Conducting and Inorganic Dielectric Drift Barriers on the Charge Decay in Parylene-C Electret Layers

[摘要] This paper reports on an attempt to improve the charge carrier life time in electret layers made of Parylene-C by implementing a patterned drift barrier close to the surface. Using various, differently structured metals and inorganic materials as a drift barrier, the initial surface potential directly after charging was increased by about 11.5% compared to electret layers made of pure Parylene-C. Furthermore, a higher charging efficiency was achieved. The charge carrier distribution has a higher homogeneity and the usually observed surface potential reduction at the rim of the electret layer was less pronounced. Against expectations, the long-term stability did not improve among the chosen materials and patterns. Regarding side effects observed with unstructured drift barriers, the electret layers with a structured drift barrier do not suffer from the horizontal discharging.

[发布机构] Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany^1

[效力级别] 能源学

[关键词] Charge decay;Charge-carrier distribution;Charging efficiency;Inorganic dielectrics;Inorganic materials;Long term stability;Potential reduction;Structured metals