Basic Research of Vibration Energy Harvesting Micro Device using Vinylidene Fluoride / Trifluoroethylene Copolymer Thin Film

[摘要] Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.

[发布机构] Waseda University, Japan^1;Institute for Materials Research, Tohoku University, Japan^2

[效力级别] 能源学

[关键词] C-V characteristic;Copolymer thin films;LCR meters;Micro-device;Vibration energy harvesting;Vinylidene fluoride;Vinylidene fluoride/trifluoroethylene copolymers