On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review

[摘要] We summarize current trends in the analysis of physical properties (surface mass density, viscosity, elasticity, friction, and charge) of various thin films measured with a solid-state sensor oscillating in a gaseous or liquid environment. We cover three different types of mechanically oscillating sensors: the quartz crystal microbalance with dissipation (QCM-D) monitoring, surface acoustic wave (SAW), resonators and magnetoelastic sensors (MESs). The fourth class of novel acoustic wave (AW) mass sensors, namely thin-film bulk acoustic resonators (TFBARs) on vibrating membranes is discussed in brief. The paper contains a survey of theoretical results and practical applications of the sensors and includes a comprehensive bibliography.

[学科分类] 自动化工程