Titanium Dioxide-Based64∘YXLiNbO3SurfaceAcoustic Wave Hydrogen Gas Sensors

[摘要] Amorphous titanium dioxide (TiO2) and gold (Au) dopedTiO2-based surface acoustic wave (SAW) sensors have been investigated as hydrogen gas detectors. The nanocrystal-dopedTiO2films were synthesized through a sol-gel route, mixing a Ti-butoxide-based solution with diluted colloidal gold nanoparticles. The films were deposited via spin coating onto64∘YXLiNbO3SAW transducers in a helium atmosphere. The SAW gas sensors were operated at various temperatures between 150 and310∘C. It was found that gold doping onTiO2increased the device sensitivity and reduced the optimum operating temperature.

[学科分类] 自动化工程