Design of Microcantilever-Based Biosensor with Digital Feedback Control Circuit

[摘要] This paper present the design of cantilever-based biosensors with new readout, which hold promises as fast and cheap “point of care” device as well as interesting research tools. The fabrication process and related issues of the cantilever based bio-sensor are discussed. Coventorware simulation is carried out to analyze the device behavior. A fully integrated control circuit has been designed to solve manufacturing challenge which will take care of positioning of the cantilever instead of creating nanometer gap between the electrodes. The control circuit will solve the manufacturing challenge faced by the readout methods where it is essential to maintain precise gap between the electrodes. The circuit can take care of variation obtained due to fabrication process and maintain the precise gap between the electrodes by electrostatic actuation. The control circuit consist of analog and digital modules. The reliability issues of the sensor are also discussed.

[学科分类] 自动化工程