Structural and Optical Properties ofIn2S3Thin Films Prepared by Flash Evaporation

[摘要] In2S3thin films were deposited by flash evaporation ofIn2S3powder. The effect of annealing in vacuum and undersulphur atmosphere on the structural and optical properties of these films was investigated. X-ray diffraction studies reveal that the as-deposited films are amorphous. The formation ofβ-In2S3phase is obtained after annealing undervacuum at 693 K. Heat treatments under sulphur pressure lead to the formation of the above phase at a less annealing temperature (573 K). The energy dispersive X-ray (EDX) analysis reveals that the sulphurized films are nearly stoichiometric and those annealed in vacuum are sulphur deficient. Optical transmission spectra showed a slightshift of the absorption edge towards lower wavelengths. The optical gap value varied between 2.4 and 3 eV as a function of the film thickness and the annealing temperature.

[学科分类] 电子、光学、磁材料