The Potential of Reactively RF Sputtered ZnO Thin Films for the Fabricationof Microwave Filters

[摘要] The piezoelectric properties of reactively sputtered ZnO thin films deposited on glass andsilicon substrates were studied in order to assess their potential for the construction ofRF overmoded filters. Films of high crystallographic orientation {002}, as shown byXRD measurements and SEM observations, and high value ofkeff2, calculated with the aid of the BVD model, were obtained after the optimization of the deposition conditions, with highly repetitive properties. Simple devices were designed and constructed onsilicon substrates which showed a quality factor of 1000 without the use of a Braggacoustic reflector, and a temperature drift of –30ppm/℃.

[学科分类] 电子、光学、磁材料