Optical and Structural Properties of Titanium Dioxide Films fromTiO2andTi3O5Starting Materials Annealed at Various Temperatures

[摘要] We investigated the optical and structural properties of titanium dioxide films deposited fromTi3O5andTiO2starting materials by electron beam evaporation at annealing temperatures from400∘Cto800∘C. We find that the refractive index of as-deposited films fromTi3O5starting material is higher than that of as-deposited films fromTiO2starting material. In addition, during thermal annealing, the refractive index fluctuates slightly as compared withTiO2films fromTiO2starting material. This should be attributed to the fact that the deposited molecules had a higher packing density, such that the film was denser. The transmittance spectra ofTiO2films fromTi3O5starting material indicate that transmittance edge slightly shifts to longer wavelength with the annealing temperature increasing when compared withTiO2starting material, in which the transmittance spectra indicate that the transmittance edge strongly shifts to longer wavelength with the same annealing temperature increasing. These findings should be attributed to the absence of oxygen and scattering of rough surface.

[学科分类] 材料工程