Mechanical and Structural Properties of Fluorine-Ion-Implanted Boron Suboxide

[摘要] Results on a systematic study on the effects of ion implantation on the near-surface mechanical andstructural properties of boron suboxide (B6O) prepared by uniaxial hot pressing are reviewed. 150 keV fluorine ions at fluences of up to5.0×1016 ions/cm2were implanted into the ultrahard ceramic material at room temperature and characterized using Raman spectroscopy, atomic force microscopy,and scanning electron microscopy with energy-dispersive X-ray spectroscopy. Evidence of ion-beam-assisted nucleation of novel clusteredBxOyFzparticles by ion implantation is revealed. In addition, obtained results also reveal that fluorine implantation into the B6O specimen leads to an overalldegradation of near-surface mechanical properties with increasing fluorine fluence. Implications of these observations in the creation of amorphous near-surface layers by high-dose ion implantation are discussed in this paper.

[学科分类] 材料工程