State of the Art in Thin Film Transistor: A Review of the UsedInsulator–Semiconductor Combinations

[摘要] This paper deals with the technology of the thin film transistor (TFT). It deals with the different semiconductorsused successfully in a TFT, as well as the different gate insulators employed. A variety of structures have beenrealized in the past. The most important difficulty with the use of these TFT structures consisted of low frequencyinstabilities, caused by mobile ions in the insulator and slow states at the semiconductor-insulator interface. Variousproposed solutions to these problems will be discussed.

[学科分类] 工程和技术（综合）