TiNxThin-Film Resistors for Hybrid Integrated Circuits

[摘要] TiNxthin-films have been evaluated for use as thin-film resistors. Thin-films were obtained by reactive triodesputtering of titanium in nitrogen atmosphere on crystallized glass substrates. In the resistiveTiNxlayers, the valueofxwas 0.96.2The value of the sheet resistance of the tested layers was 30 ohm/sq. Stability and TCR weremeasured during accelerated ageing.

[学科分类] 工程和技术（综合）