Influence of the Substrate on the Electrical Properties ofThick-Film Resistors

[摘要] The effect of substrate type on the electrical properties of thick film resistors is determined. Five differentsubstrates are used. The following properties are investigated: – thermal expansion, resistor profiles, resistance,TCR and resistor gauge factor. The resistors are physically inspected using X-ray diffractometry and electronprobe analysis. This paper shows that conduction mechanism models for thick-film resistors generally need nottake into account chemical and structural interactions with the substrate. However the effect of substrate on TCRvalues is significant for resistors exhibiting a large piezoresistive effect.

[学科分类] 工程和技术（综合）