Materials and Applications for Thin Films in Hybrid Microelectronics

[摘要] The use of thick films in microelectronics has increased in an impressive way during the last years. In contrast to this,thin films have shown a less spectacular but nevertheless steady evolution which concerned mainly more efficientdeposition methods (planar magnetron) as well as higher quality films and thus better components and circuits. Thepresent paper aims at illustrating this by some selected examples.

[学科分类] 工程和技术（综合）