The Determination of the Thickness of Anodic Al2O3Film

[摘要] To compare the properties of anodized aluminium oxide layers an easy thickness determination method is wanted. Crevecoeur and De Wit used a method expressing the thickness in terms of peak voltages obtained by forming again after annealing. The aim of the work described here is to relate the value of the peak voltage to the thickness of the layer measured by ellipsometry.On specimens formed in an aqueous solution of b oric acid and ammonium hydroxide the following relation is found between the thicknessd(nm) and peak voltageVp(volt):d= 1.020Vp+ (0.00044 ± 0.00011)Vp2. On specimens formed in a solution of ammonium pentaborate in ethylene glycol the squaredVpterm is of a lower value. however whenVpis less than 150 V the above relation holds for layers formed in both electrolytes, the systematic error then being less than 1%.

[学科分类] 工程和技术（综合）