Comparison of Arc Erosive and Laser Beam Trimming of Thin FilmResistors

[摘要] The physical processes of arc erosive micromachining and the influence of trimming on the parameters of resistorshave been examined, and thin film resistors without trimming are compared with those trimmed by arc erosion andlaser beam machining.In the paper a theoretical model for arc erosion of thin films is proposed. The optimal conditions of arc erosivetrimming are determined. The shape of the cuts are recorded and examined. The applicability of arc erosivetrimming with respect to stability is proved. A measuring method is introduced for resistors trimmed by arc erosionusing a direct current generator.

[学科分类] 工程和技术（综合）