Techniques for the Examination of Thick Film Resistor Microstructures by T.E.M.

[摘要] This paper discusses the preparation techniques which can be used for the examination of thick film resistor microstructuresby Transmission Electron Microscopy. The application of this technique, including High Voltage ElectronMicroscopy and Electron Microscope Mass Analysis, to both Ruthenium Dioxide and Bismuth Ruthenate basedthick film resistors, is considered.

[学科分类] 工程和技术（综合）