Factors Affecting Laser-Trim Stability of Thick Film Resistors

[摘要] Various factors affecting precision of trim and resistor stability are considered. The influence of machine operatingparameters (beam power, pulse frequency and trim speed) on resistor performance are examined and quantifiedthrough statistically designed experiments for aQ-switched YAG laser system. Laser kerf quality is examined byscanning electron microscopy and related to kerf isolation resistance measurements. A relatively simple, productionoriented, quality control test is proposed for rapid determination of kerf electrical stability. In addition, the effectof cut design and extent of trim on precision and stability are discussed.

[学科分类] 工程和技术（综合）