An Inexpensive Diffusion Furnace

[摘要] The paper describes the design of a low cost diffusion furnace suitable for monolythic circuit manufacture ineducational and other establishments, where throughput is small. Features include maximum temperature of1300℃, direct reading set temperature dial, flat zone 55 mm and an idle temperature of 420℃ when thefurnace is not in use.Four such furnaces have been in operation at the School of Electronic Engineering, South AustralianInstitute of Technology, each for a twelve month period and have given trouble free operation.

[学科分类] 工程和技术（综合）