The Problems of Selecting a Proper Microlithographic Imaging System

[摘要] Considering the increased importance of custom integrated circuits in electronic equipments and other products there is a research activity in Hungary to develop a “state-of-the-art” semiconductor development laboratory for technology development and prototype circuit fabrication. The most significant parts of this laboratory are circuit design, mask making and wafer lithography. The problems associated with these three parts are discussed.

[学科分类] 工程和技术（综合）