New Alumina Substrates for Microelectronics

[摘要] Alumina substrates of Al2O3–MgO–Cr2O3give excellent surface smoothness. These were studied with respect totheir green tapes, the surface finish of fired substrates, and in particular smoothness. The factors contributing tothese characteristics were investigated, in particular the effect of the addition of Cr2O3on surface smoothness.

[学科分类] 工程和技术（综合）