State of the Art of Thin Film Components

[摘要] The main reasons for the development of thin film technology are miniaturisation, reliability and high frequencyapplications. A comparison with conventional components, and with the demands of system engineers shows thatthe thin film resistor problem is solved and that there are thin film capacitors for many applications, whereas coilsof only small values and low Q can be made. As the distances between thin film circuit elements can be extremelysmall, low conductor resistance between components is possible. The inherent advantages of thin film technologyare good reliability because of fewer connections, the possibility of functional trimming, small TCR and TCCvariation in a circuit, and TCR-TCC balancing. Furthermore parasitic effects can be well controlled, distributedelements realized and large scale integration carried out.

[学科分类] 工程和技术（综合）