A New Analytical Expression for the T.C.R. of Thin Monocrystalline Metal Films

[摘要] The analysis of electrical conductivity of continuous thin monocrystalline metal film has been treated by assumingthat the scattering from other sources than grain-boundaries can be described by an effective relaxation time. Thisrelaxation time method is applied to the temperature coefficient of resistivity and leads to an analytical approximateequation in terms of the grain-boundary reflection coefficientrand the reduced thicknessk.Comparison of the results with those deduced from the exact equation (derived from the Mayadas and Shatzkestheory) shows that they deviate by less than 5% in largek–,p–, andr– ranges.

[学科分类] 工程和技术（综合）