The Anomalous Properties of Polysiloxane Films

[摘要] An electron beam was used to create thin polysiloxane films from methylphenylsiloxane and the anomalous propertiesof permittivity and temperature dependence, the resistivity dependence on humidity and the permittivity dependenceon pressure of air or argon, was examined. These anomalous properties can be potentially applicable to humidityprobes, pressure gauges and for miniature capacitors.

[学科分类] 工程和技术（综合）