Telemetric surface acoustic wave sensor for humidity

[摘要] Surface acoustic wave sensors consist of a piezoelectricsubstrate with metal interdigital transducers (IDT) ontop. The acoustic waves are generated on the surface of thesubstrate by a radio wave, as it is well known in band passfilters. The devices can be used as wireless telemetric sensorsfor temperature and humidity, transmitting the sensed signalas a shift of the sensor’s resonance frequency.

[学科分类] 电子、光学、磁材料