Accurate modeling of high frequency microelectromechanical systems (MEMS) switches in time- and frequency-domainc

[摘要] In this contribution we present an accurate investigationof three different techniques for the modeling of complexplanar circuits. The em analysis is performed by meansof different electromagnetic full-wave solvers in the timedomainand in the frequency-domain. The first one is theTransmission Line Matrix (TLM) method. In the second onethe TLM method is combined with the Integral Equation (IE)method. The latter is based on the Generalized TransverseResonance Diffraction (GTRD). In order to test the methodswe model different structures and compare the calculated Sparametersto measured results, with good agreement.

[学科分类] 电子、光学、磁材料