Benefits of on-wafer calibration standards fabricated in membrane technology

[摘要] In this work we compare on-wafer calibration standards fabricated in membranetechnology with standards built in conventional thin-film technology. Weperform this comparison by investigating the propagation of uncertainties inthe geometry and material properties to the broadband electrical propertiesof the standards. For coplanar waveguides used as line standards theanalysis based on Monte Carlo simulations demonstrates an up to tenfoldreduction in uncertainty depending on the electromagnetic waveguide propertywe look at.

[学科分类] 电子、光学、磁材料