Design of RF MEMS based switch matrix for space applications

[摘要] RF MEMS based switch matrices have several advantages compared to themechanical or solid-state switch based ones for space applications. They arecompact, light and less lossy with a high linearity up to high frequency. Inthis work, a 12 × 12 switch matrix with RF MEMS and LTCCtechnologies is presented based on the planar Beneš network. Thesimulated performance of the 12 × 12 switch matrix is below−12 dB IL (Insertion Loss) up to C band and −15 dB RL (Return Loss) upto Ku band. Moreover, it has a good isolation better than −50 dB. A4 × 4 switch matrix with the same design process and technologies isfabricated and measured to verify the 12 × 12 switch matrix designprocess. The measured performance agrees very well to the simulations.

[学科分类] 电子、光学、磁材料