A torsional sensor for MEMS-based RMS voltage measurements

[摘要] RF voltage measurement based on electrostatic RMS voltage-to-forceconversion is an alternative method in comparison to theconventional thermal power dissipation method. It is based on amechanical force induced by an RF voltage applied to amicro-mechanical system. For a theoretically adequate resolutionand high precision measurements, the necessary geometricaldimensions of the sensor require the application ofmicro machining. In this contribution, the dependence betweenelectrical and geometrical properties of different sensor designsis investigated. Based on these results, problems related topractical micro-machining and solutions with respect to possiblesensor realizations are discussed. The evolution of differentsensor generations is shown.

[学科分类] 电子、光学、磁材料