Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

[摘要] We present a transition from a contact structure built on highly-conductivesilicon to a coplanar waveguide (CPW) fabricated in membrane technology. Teststructures were fabricated and measured. The silicon-to-membrane transitionis suitable for on-wafer probing and provides less than −10 dB measuredreflection in the frequency range from 1 to 110 GHz. Measured and calculatedvalues of the propagation constant of the membrane CPW agree well in theentire frequency range.

[学科分类] 电子、光学、磁材料