Analytical Electron Microscopy of Interfaces in Cathodic Arc Coatings

[摘要] The aim of this work was to study the effects of changing the substrate bias and orientation on arc evaporated nitride coatings. The microstructure and microchemistry of the coatings were investigated with emphasis placed on study of the coating/substrate interface region which governs the adhesion of the coating - a property that is vital to the functional performance of the coating. The effect of the sputter cleaning process prior to deposition of the coating was investigated in some detail.

[发布机构] University:University of Glasgow

[关键词] Applied physics, Condensed matter physics