CHARACTERISTICS OF THE HORIZONTAL EPITAXIAL REACTOR

[摘要] References(15)Cited-By(1)Concentration distributions of reactant and mass transfer coefficient in a horizontal epitaxial reactor were numerically calculated from fundamental equations under some assumptions in the case of mass transfer rate control. The concentration distribution in the cross-section of the channel became uniform when Gr and the distance from the leading edge were increased or the feed rate of gas was decreased. To check the calculated results, carbon plates were burned in this reactor under the mass transfer rate control and local concentration of carbon dioxide was measured. The calculated concentration and mass transfer coefficient were a sufficiently good approximation to the experimental ones.