Low resistance ohmic contacts to n-GaAs for application in GaAs/AlGaAs quantum cascade lasers

[摘要]

[发布日期] [发布机构]

[效力级别] [学科分类] 光谱学

[关键词] ohmic contacts;sputtering;rapid thermal annealing (RTA);quantum cascade lasers (QCLs) [时效性]

浏览次数：21