Effect of annealing temperature on the morphology of ohmic contact Ti/Al/Ni/Au to n-AlGaN/GaN heterostructures

[摘要]

[发布日期] [发布机构]

[效力级别] [学科分类] 光谱学

[关键词] ohmic contacts;heterostructure;AlGaN/GaN heterostructure;Ti/Al/Ni/Au [时效性]

浏览次数：15