Design and analysis of a MEMS variable capacitor using thermal actuators
[摘要] We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitoris composed by two main components: 1) ...
[发布日期] [发布机构]
[效力级别] [学科分类] 电子、光学、磁材料
[关键词] MEMS Design;MEMS FEA;Variable Capacitors;Thermal Actuators. [时效性]
