Carbon Based Nanoelectromechanical Resonators.

[摘要] Owing to their light mass and high Young’s modulus, carbon nanotubes (CNTs) and graphene are promising candidates for nanoelectromechanical resonators capable of ultrasmall mass and force sensing. Unfortunately, the mass sensitivity of CNT resonators is impeded by the low quality factor (Q) caused by intrinsic losses. Therefore, one should minimize dissipations or seek an external way to enhance Q in order to overcome the fundamental limits. In this thesis, I first carried out a one-step direct transfer technique to fabricate pristine CNT nanoelectronic devices at ambient temperature. This process technique prevents unwanted contaminations, further reducing surface losses. Using this technique, CNT resonators was fabricated and a fully suspended CNT p-n diode with ideality factor equal to 1 was demonstrated as well. Subsequently, the frequency tuning mechanisms of CNT resonators were investigated in order to study their nonlinear dynamics. Downward frequency tuning caused by capacitive spring softening effect was demonstrated for the first time in CNT resonators adopting a dual-gate configuration. Leveraging the ability to modulate the spring constant, parametric amplification was demonstrated for Q enhancement in CNT resonators. Here, the simplest parametric amplification scheme was implemented by modulating the spring constant of CNTs at twice the resonance frequency through electrostatic gating. Consequently, at least 10 times Q enhancement was demonstrated and Q of 700 at room temperature was the highest record to date. Moreover, parametric amplification shows strong dependence on DC gate voltages, which is believed due to the difference of frequency tunability in different vibrational regimes. Graphene takes advantages over CNTs due to the availability of wafer-scale graphene films synthesized by chemical vapor deposition (CVD) method. Thus, I also examined graphene resonators fabricated from CVD graphene films. Ultra-high frequency (UHV) graphene resonators were demonstrated, and the Qs of graphene resonators are around 100. Future directions of graphene resonators include investigating the potential losses, exploring the origin of nonlinear damping, and demonstrating parametric amplification for Q enhancement.

[发布机构] University of Michigan

[效力级别] Electrical Engineering

[关键词] Carbon Nanotube and Graphene Nanoelectromechanical Resonators;Electrical Engineering;Engineering;Electrical Engineering