Structural characterization of vacuum evaporated ZnSe thin films

[摘要] Thermally evaporated ZnSe thin films deposited on glass substrates within substrate temperatures (ð‘�??_s) at 303 Kâ€�??623 K are of polycrystalline nature having f.c.c. zincblende structure. The most preferential orientation is along [111] direction for all deposited films together with other abundant planes [220] and [311]. The lattice parameter, grain size, average internal stress, microstrain, dislocation density and degree of preferred orientation in the film are calculated and correlated with ð‘�??_s.

[学科分类] 材料工程

[关键词] ZnSe thin films;X-ray diffraction;average internal stress;microstrain;dislocation density.