3-D mapping with ellipsometrically determined physical thickness/refractive index of spin coated sol�?�gel silica layer

[摘要] Precursor sol for solâ€�?�gel silica layer was prepared from the starting material, tetraethylorthosilicate (TEOS). The sol was deposited onto borosilicate crown (BSC) glass by the spinning technique (rpm 2500). The gel layer thus formed transformed to oxide layer on heating to 450°C for ∼ 30 min. The physical thicknessand the refractive index of the layer were measured ellipsometrically (Rudolph Auto EL II) at 632.8 nm. About 10 Ã�? 10 mm surface area of the silica layer was chosen for evaluation of thickness and refractive index values at different points (121 nos.) with 1 mm gap between two points. Those data were utilized in the Autolisp programme for 3-D mapping. Radial distribution of the evaluated values was also displayed.

[学科分类] 材料工程

[关键词] Solâ€�?�gel silica layer;ellipsometric studies;refractive index;physical thickness;3D-mapping.