An investigation into the fabrication ofnanomechanical switches

[摘要] ENGLISH ABSTRACT: This report intends to show how able the Stellenbosch Electrical and ElectronicEngineering Department's micro fabrication laboratory is to manufacturenanomechanical switches and similar structures. Following the investigation,an attempt will be made to produce these devices.In attaining this goal, a literature study was performed focusing on mechanicalswitching and nanotechnology. Their origins, development and currentapplication are investigated, as well as the requirements for developing thesedevices.Having completed the literature study, a series of current nanomechanicalswitches where investigated, selecting those most likely to be manufactured atthe available facilities and having the required attributes for taking the placeof silicon transistors in low speed, hostile environments.The most common method of manufacturing nanoswitches is simulated usingseveral methods of predicting device failure. This will aid in the selection ofmanufacturing process guidelines, such as dimensions in the photoresist templatesand layer thickness before etching, allowing for the repeated productionof functional switches.The two manufacturable nanomechanical switches are investigated, usingtechniques and materials available at the micro fabrication laboratory to manufacturethem. Subsequently, their electrical properties will be determined andused in simulating their failure characteristics.In conclusion, the result are discussed along with advice and improvementsfor the continued investigation and production of nanodevices at StellenboschUniversity

[发布机构] Stellenbosch University