A 2 x 2 array of the multi-degree-of freedom ultrasonic actuators for a low profile two-dimensional sliding table

[摘要] References(8)In this paper, we propose a configuration for the two dimensional array of multi-degree-of-freedom (MDOF) ultrasonic actuators suitable for two-dimensionally moving table. The MDOF motions of a ball rotor are achieved by the combination of two bending and one longitudinal vibrations excited on columns fixed on a substrate. A 2 x 2 array of MDOF column actuator is fabricated for two-dimensional movement of a plate placed on the array. Only one piezoelectric element is used for one column instead of a stack of different types of PZT elements to drive the vibrations. First, we describe the configuration of the actuator, an excitation method of each vibration, and the operating principle of the stage motion. Then, moving table operation was demonstrated and evaluated.

[学科分类] 电子、光学、磁材料

[关键词] microactuator;multi-degree-of-freedom;ultrasonic actuator