Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

[摘要] References(7)Cited-By(1)We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.

[学科分类] 电子、光学、磁材料

[关键词] slanted etching;optical waveguide;optical coupler