An optical grating filter dry-etched on a LiNbO3 substrate

[摘要] References(8)Cited-By(1)We fabricated an etched grating filter on a Ti-diffused waveguide in LiNbO3 using inductively coupled plasma etching with C4F8/Ar as an etching gas, which has an etching rate of 85.1nm/min. The etched grating filter had a reflectivity of 35% and a bandwidth of 0.02nm. Maximum reflectivity was obtained when the electric field of an incident beam was perpendicular to the grating.

[学科分类] 电子、光学、磁材料

[关键词] LiNbO3;ICP;dry etching;grating