Development of high-yield fabrication technique for MEMS-PhC devices

[摘要] References(9)Cited-By(2)We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2dB modulation with 86V) was experimentally obtained.

[学科分类] 电子、光学、磁材料

[关键词] optical modulators;electrostatic actuators;photonic integrated circuits;2-dimensinal photonic crystal waveguide