High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system

[摘要] References(7)Cited-By(9)Fatigue testing of micromachined single-crystal silicon was performed using a test system that allowed simultaneous testing of multiple samples. The on-chip test structure, including an actuator, was fabricated using 0.6µm resolution lithography to improve the morphological uniformity of the samples. Fatigue test results exhibited a clear tendency for the lifetime to lengthen when the strain amplitude or ambient humidity was decreased. The strain-life relationship at 50%RH was analyzed using the Paris law, and a crack propagation exponent of 19 was obtained.

[学科分类] 电子、光学、磁材料

[关键词] fatigue test;silicon;MEMS;lifetime;S-N curve;resonator