Measurement of elastic properties of hard films using Brillouin scattering

[摘要] Brillouin scattering of light is used to study the various surface acousticmodes that are predicted theoretically to be supported by TiN thin filmson high speed steel (HSS). Information is thereby obtained on the elasticproperties and adhesion of the films, which range in thickness from 20nm to4180nm. A Green's function method, invoking the surface ripple mechanismfor the inelastic scattering of light, is used to calculate the Brillouin spectrumfor scattering from the surface acoustic excitations. For the TiN/HSScombination, guided modes take the form of true SAW, highly damped p-SAW, pre-Rayleigh and quasi-Rayleigh and its higher order modes asthe film thickness increases. (Abbreviation abstract)

[发布机构] University of the Witwatersrand