MEMS micropump for a Micro Gas Analyzer

[摘要] (cont.) This thesis presents vacuum generating micropump performance that comparables well with the best published to date, and explores future micropump designs and modeling/testing approaches that could improve overall performance and bring us closer to meeting the specifications set forth by the MGA project. Finally, general guidelines for micropump design and fabrication for any application are also presented.

[发布机构] Massachusetts Institute of Technology